3.00 Credits
The course focuses on important methodologies and fundamental knowledge required for design and modeling/simulation of microsystems, microsensors and microactuators and fits into the canon of courses around semiconductor device physics, microfabrication, microsystems characterization and others. Its two main pillars are I. Design methodologies including; methods and design flow, general solution strategies, conceptualization, system level simulation and macro models (as applied to Mechanical models, Thermal models, & Electrical models), and translating designs into layouts and masks as used in microfabrication procedures. II. Numerical Field Analysis and its mathematical underpinnings, enabling students to fully comprehend the mathematics and boundary conditions and limitations associated with those approaches as used in common finite element, boundary element and other field and numerical simulations of complex systems The course also includes an integrated lab section/practical project (time slots for this will be sorted out in the first week of classes), during which students will apply the knowledge and design, model, simulate a microsystems design (either on their own computers or in the CADE lab) that could be applied to their ongoing research or project efforts. The output of that modeling and simulation effort will then be translated into a microsystems fabrication flow and mask design (all the way to a GDSII file output that could then be used to actually fabricate such a device, but falling short of actually building the device). Prerequisites: 'C-' or better in (ECE 5221 OR ECE 6221 OR ME EN 5050 OR ME EN 6050 OR MSE 6421 OR BME 6421) AND NOT on ECE Monitoring Group